We need to know following information to estimate the cost of the curling probe.
Please check with (レ or■) in the corresponding box,□. |
Pre-Purchase Questionnaire
1.Please write down about the current plasma
a) RF frequency
□ DC □ pulse (pulse width: ____ms, repeat frequency: ______)
□ RF ( _______MHz) □ microwave ( ______GHz)
b) Plasma type
□ Capacitive coupled plasma (CCP) □ Inductively coupled plasma (ICP)
□ Magnetron discharge □ Discharge using a magnetic field (magnetic flux density _____T)
c) Plasma gas
● Gases:
● Plasma pressure:
2.Plasma process application.
□ CVD (thin film deposition) □ Etching
□ Ashing, Clean □ Sputtering
□ Surface Modification □ Other ( )
3.Please tell us about the settings of this probe.
□ Curling probe (only for the electron density measurement)
* Network analyzer is required to measure the electron density. Please check one of the followings.
□ Already have them(Do not need analyzer or spectroscopy unit)
□ Want analyzer or measurement unit as a whole system
4.Please check the corresponding type of connection port for the probe insertion.
a) Current port size, inside diameter: _________mm
b) Please select your desired flange model and size from the options below.
□ Standard flange: NW25
□ Other (please specify):____________________
5. The distance between the port and the measurement point inside plasma.
□ Approximately __________ cm.
We need this information to determine the probe length.
*(see FigureCurling Probe Mounting drawing).
6. Please select the coaxial cable to be incorporated into the probe from the following.
□ PTFE type (Approximately 100℃ heat resistant)
□ SiO2 type (Approximately 500 ℃ heat resistant)
Due to high temperature inside plasma, it requires a high temperature resistant coaxial cable.
7. Please select from the following: the size of probe head.
□ 16 mm in OD
□ 10 mm in OD
* The smaller the diameter has a lower measurement accuracy of the low electron density. We
recommend the probe diameter of 16 mm for measuring electron density lower than approximately
1 ×10∧11cm-3. The probes with the diameter of 10 mm are for higherdensities.
8. Suppression of impurity release from probe
By coating the stainless steel probe with a thin film, the generation of metal impurities can be
suppressed. It is also possible to prevent damage to the dielectric cover of the probe and suppress
abnormal discharge between the probe and the probe.
If you have a preference, please choose from the following.
□ Not required □ Alumina spraying □ Yttria spraying
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Manufacturing vender：Noa Leading Co.,Ltd.Industry & Trade Center Bldg. B106Yamashitacho,2-chome,.Naka-ku,Yokohama CityKanagawa 231-0023,JapanTel；045-319-6690 Fax；045-319-6691 |
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