We have developed a high-sensitivity curling probe.The absorption peak is sharper than before, the accuracy of the absorption frequency is greatly improved,and the behavior of the plasma can be measured accurately.
|
⇒ |
High sensitivity antenna
|
|
Conventional type
 |
|
|
|
Metal integrated highsensitivity antenna |
■ Newly developed high sensitivity Curling Probe |
Compared with the sensitivity -5.8dB of conventional product,the new high-sensitivity Curling Probe achieves a sensitivity of -27.8dB,Approximately 4.7 times higher.
■ Development example of high sensitivity curling probe(1) |
【Air / vacuum type plasma probe is under development】We are developing an air / vacuum-isolated plasma probe with a glass cylinder using a curling probe withan outer dimension of 10mmφ.We aim to improve the reproducibility of peak intensity using a high sensitivity antenna.
■ Curling probe sensitivity change in air / vacuum isolation with glass cylinder |
■ Development example of high sensitivity curling probe (２) |
【Realized low resonance frequency of plasma probe with long antenna】Resonance frequency can be lowered by increasing the antenna length of the curling probe.The sensitivity to detect plasma can be improved by lowering the resonance frequency.We have developed a curling probe whose resonance frequency is lowered by a long antenna plasmaprobe.
|
