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■Curling Probe (Plasma Monitoring Tool) Introduction

Innovative  Plasma Monitoring Tool Curling Probe

Electron Density & Optical Emission at the same time and location
from Atmospheric Plasma and Pulse Plasma

 ●Measurable even when film is deposited
    ●From low to atmospheric pressure
    ●Wide plasma density range (108~1013cm-3)
    ●Optical emission analysis (same time)
    ●Available for pulse plasma
    ●Usable for monitoring of film thickness
     （thickness? ０．１μｍ）
    ●Easy operation, low cost